Fast scan-fail device for class 1 operation of scanning micromirrors at a high laser power in the near-infrared region

Author(s)
S. Bogatscher, C. Giesel, T. Beuth, H. Umesh-Babu, L. Shinohara, N. Heussner, A. Streck, W. Stork
Journal
Proc. SPIE 8512, Infrared Sensors, Devices, and Applications II
Year
2012
Online Sources
http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1381864
DOI
10.1117/12.929717
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